Review of SI traceable force metrology for instrumented indentation and atomic force microscopy

Abstract

This paper reviews the current status of small force metrology for quantitative instrumented indentation and atomic force microscopy (AFM), and in particular focuses on new electrical and deadweight standards of force developed at the National Institute of Standards and Technology (NIST). These standards provide metrological infrastructure so that users of instrumented indentation and AFM can achieve quantitative nanomechanical testing of materials, engineered surfaces and micro and nanoscale devices in terms of forces that are expressed in internationally accepted units of measure with quantified uncertainty.