Performance of thermally excited resonators

Resonator sensors-a review

Robert M. Langdon · Journal of Physics E Scientific Instruments · 1985 · 215 citations

Engineering, Materials Engineering, Materials Science +17

Resonating microbridge mass flow sensor

S. Bouwstra, R. Legtenberg, H.A.C. Tilmans · Sensors and Actuators A Physical · 1990 · 92 citations · Full text

Engineering, Chemical Engineering, Instrumentation +6

The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate

Roman Wilfinger, Paul H. Bardell, D. S. Chhabra · IBM Journal of Research and Development · 1968 · 84 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Thermally Excited Resonating Membrane Mass Flow Sensor

S. Bouwstra, Paul Kemna, R. Legtenberg · Sensors and Actuators · 1989 · 36 citations · Full text

Engineering, Bioengineering, Biomems +9

Electrothermally excited silicon beam mechanical resonators

Masuri Bin Othman, A Brunnschweiler · Electronics Letters · 1987 · 33 citations

Engineering, Electrical Engineering, Mechanical Engineering +17