Concepedia

Roughening behavior in Si/SiGe heterostructures under O2+ bombardment

G.S. Lau, Eng Soon Tok, R. Liu, Andrew T. S. Wee, J. Zhang

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 13 citations · 17 references

DOI

Concepts

References

17

Computer simulations of sputtering

J.P. Biersack · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 259 citations

, , +10

Sputter depth profile analysis of interfaces

S. Hofmann · Reports on Progress in Physics · 1998 · 206 citations

, , +17

Atomic mixing, surface roughness and information depth in high‐resolution AES depth profiling of a GaAs/AlAs superlattice structure

S. Hofmann · Surface and Interface Analysis · 1994 · 178 citations

, , +15

Influence of atomic mixing and preferential sputtering on depth profiles and interfaces

Z. L. Liau, B-Y. Tsaur, J. W. Mauer · Journal of Vacuum Science and Technology · 1979 · 160 citations · Full text

, , +17

Evaluation of concentration-depth profiles by sputtering in SIMS and AES

S. Hofmann · Applied Physics A · 1976 · 159 citations

, , +6