Fabrication of Si-based planar type patch clamp biosensor using silicon on insulator substrate - Concepedia

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Fabrication of Si-based planar type patch clamp biosensor using silicon on insulator substrate

20

Citations

9

References

2007

Year

Z.L. Zhang, Toshifumi Asano, Hidetaka Uno, Ryugo Tero, Mitsukazu Suzui, Satoshi Nakao, Takashi Kaito, Koji Shibasaki, Makoto Tominaga, Y. Utsumi,

Thin Solid Films

Electrical EngineeringEngineeringMicrofabricationBioelectronicsSensor DesignBiomedical EngineeringInsulator SubstrateSilicon On InsulatorMicroelectronicsPlanar Waveguide Sensor

References

	Year	Citations

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