Concepedia
Microsystem Technologies · 2000 · 81 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceComputer-integrated ManufacturingMicrofabricationMicrofabrication ProcessesMicromachiningMicrostructure AnalysisMicrostructure ControlMicrostructure EvolutionHigh-aspect-ratio StructuresLiga ProcessMicrostructure Fabrication