Concepedia

Publication | Closed Access

SiC cantilever resonators with electrothermal actuation

DOI

65

Citations

20

References

2006

Year

Liudi Jiang, Rebecca Cheung, John Hedley, Musaab Hassan, A.J. Harris, J.S. Burdess, Mehran Mehregany, Christian A. Zorman
Sensors and Actuators A Physical

References

YearCitations

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