SiC cantilever resonators with electrothermal actuation

Micromechanical Membrane Switches on Silicon

K. Petersen · IBM Journal of Research and Development · 1979 · 313 citations

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Thermally excited silicon microactuators

W. Riethmüller, W. Benecke · IEEE Transactions on Electron Devices · 1988 · 294 citations

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Monocrystalline silicon carbide nanoelectromechanical systems

Ya‐Tang Yang, K. L. Ekinci, Xuefei Huang et al. · Applied Physics Letters · 2001 · 287 citations · Full text

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Epitaxial growth of 3C–SiC films on 4 in. diam (100) silicon wafers by atmospheric pressure chemical vapor deposition

Christian A. Zorman, Aaron J. Fleischman, A.S. Dewa et al. · Journal of Applied Physics · 1995 · 225 citations

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Bent-beam electro-thermal actuators for high force applications

Long Que, J.-S. Park, Yogesh B. Gianchandani · 1999 · 144 citations

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