Materials Science in Semiconductor Processing · 2006 · 40 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologySurface ScienceAmorphous MaterialsAmorphous SolidsLaser Surface ProcessingNanostructured SurfacesSemiconductor SurfacesSurface MorphologyAmorphous SiliconLaser AnnealingLaser Surface AnnealingLaser Surface NanostructuringSilicon Surface Science
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Sub-100 nm nanostructuring of silicon by ultrashort laser pulses
R. Le Harzic, H. Schuck, Daniel Sauer et al. · Optics Express · 2005 · 153 citations · Full text
Laser-induced explosive boiling during nanosecond laser ablation of silicon
V. Crăciun, Nabil Bassim, R. K. Singh et al. · Applied Surface Science · 2002 · 101 citations