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Surface micro-structuring of silicon by excimer-laser irradiation in reactive atmospheres

Materials ScienceAdvanced Laser ProcessingEngineeringPhysicsMicrofabricationSurface ScienceApplied PhysicsLaser ApplicationsLaser Processing TechnologyLaser-assisted DepositionPulsed Laser DepositionLaser-surface InteractionsOptoelectronicsSilicon On InsulatorReactive Atmospheres