Modeling, design, fabrication and measurement of a single layer polysilicon micromirror with initial curvature compensation

Continuous-membrane surface-micromachined silicon deformable mirror

Thomas G. Bifano · Optical Engineering · 1997 · 116 citations

Engineering, Manufacturing Engineering, Microfabrication +14

Technology and applications of micromachined silicon adaptive mirrors

Gleb Vdovin · Optical Engineering · 1997 · 95 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +15

Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results

Michael C. Roggeman · Optical Engineering · 1997 · 50 citations

Natural Sciences, Materials Science, Microelectromechanical Systems +16

<title>Nonlinear flexures for stable deflection of an electrostatically actuated micromirror</title>

D. Burns, Victor M. Bright · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 48 citations

Engineering, Mechanical Engineering, Actuators +13

Implementation and characterization of a flexure-beam micromechanical spatial light modulator

Tseng-Hwang Lin · Optical Engineering · 1994 · 29 citations

Engineering, Electrical Engineering, Mechanical Engineering +13