Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals

A. N. Cleland, M. L. Roukes · Applied Physics Letters · 1996 · 536 citations · Full text

Engineering, Materials Engineering, Materials Science +17

A comparison of squeeze-film theory with measurements on a microstructure

M.K. Andrews, I.M. Harris, G.C. Turner · Sensors and Actuators A Physical · 1993 · 214 citations

Natural Sciences, Materials Science, Physics +10

Mechanical behavior of ultrathin microcantilever

Jinling Yang, Takahito Ono, Masayoshi Esashi · Sensors and Actuators A Physical · 2000 · 144 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication and characterization of nanoresonating devices for mass detection

Zachary J. Davis, G. Abadal, Oliver Kühn et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 120 citations

Engineering, Materials Engineering, Materials Science +17

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

G. Abadal, Zachary J. Davis, B. Helbo et al. · Nanotechnology · 2001 · 117 citations

Engineering, Electrical Engineering, Mechanical Engineering +17