Sensors and Actuators A Physical · 2000 · 144 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsMicroelectromechanical SystemsMicrofabricationMems MaterialsMicroelectromechanical SensorsMicrofabrication ProcessesMicromachiningNanomechanical PropertiesNanomechanicsMechanical Properties Of NanomaterialsMicrocantilever DesignMicromechanics Of ElasticityMicroresonatorsSize-dependent Mechanical Behavior
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Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device
J. R. Barnes, R. J. Stephenson, Mark E. Welland et al. · Nature · 1994 · 324 citations