Microelectronic Engineering · 2004 · 14 citations · 30 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryPhysical ChemistryThin FilmsNanomaterial CharacterizationOptical Properties Of SolidsSurface PhysicsThin Film Optical PropertiesThin Film OxidationThin Film Thermal PropertiesMesophase StructureMesoporosity EngineeringMesoporous MaterialsMesoporous NanomaterialsReflectivitySmall-angle X-ray ScatteringSmall-angle X-ray Scattering AnalysisX-ray Reflectivity
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