Concepedia

Novel FIB-based sample preparation technique for TEM analysis of ultra-thin gate oxide breakdown

Joachim C. Reiner, Philippe Gasser, U. Sennhauser

Microelectronics Reliability · 2002 · 11 citations · 0 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesDevice CharacterizationElectronic Material CharacterizationOxide SemiconductorsSemiconductor ReliabilityGate Dielectric EngineeringGate Oxide DegradationGate Oxide ReliabilityGate Oxide Thickness EffectsOxide BreakdownOxide ReliabilityThin Oxide Films