An active heat-based restoring mechanism for improving the reliability of RF-MEMS switches

ESD in silicon integrated circuits

Microelectronics Reliability · 1996 · 442 citations

Engineering, Electrical Engineering, Microelectronics +9

Elastic-plastic analysis of deformation induced by thermal stress in eutectic composites: I. theory

G. Garmong · Metallurgical Transactions · 1974 · 96 citations

Natural Sciences, Materials Engineering, Materials Science +17

A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process

S. Chang, S. Sivoth · IEEE Electron Device Letters · 2006 · 71 citations

Engineering, Electrical Engineering, Materials Science +15

Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process

Lia Almeida, Ramesh Ramadoss, Robert L. Jackson et al. · Journal of Micromechanics and Microengineering · 2006 · 60 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A High-Power Temperature-Stable Electrostatic RF MEMS Capacitive Switch Based on a Thermal Buckle-Beam Design

Rashed Mahameed, Gabriel M. Rebeiz · Journal of Microelectromechanical Systems · 2010 · 52 citations

Engineering, Electrical Engineering, Mechanical Engineering +17