Concepedia

Relationship between texture and electromigration lifetime in sputtered AI-1% Si thin films

A. N. Campbell, R. E. Mikawa, D. B. Knorr

Journal of Electronic Materials · 1993 · 43 citations · 15 references

DOI

Concepts

References

15

A Direct Method of Determining Preferred Orientation of a Flat Reflection Sample Using a Geiger Counter X-Ray Spectrometer

L. G. Schulz · Journal of Applied Physics · 1949 · 825 citations

, , +15

Effect of texture and grain structure on electromigration in Al-0.5%Cu thin films

Shefali Vaidya, A. K. Sinha · Thin Solid Films · 1981 · 354 citations

, , +12

Electromigration Damage in Aluminum Film Conductors

M. J. Attardo, R. Rosenberg · Journal of Applied Physics · 1970 · 264 citations

, , +16

Diffusion phenomena in thin films and microelectronic materials

H.K.H. · Materials Research Bulletin · 1989 · 218 citations

, , +16

Grain size dependence of electromigration-induced failures in narrow interconnects

J. Cho, Carl V. Thompson · Applied Physics Letters · 1989 · 206 citations

, , +17