Single-crystal diamond tools formed using a focused ion beam: Tool life enhancement via heat treatment

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Ion-beam-induced amorphization and recrystallization in silicon

Lourdes Pelaz, Luis A. Marqués, J. Barbolla · Journal of Applied Physics · 2004 · 363 citations

Engineering, Materials Engineering, Materials Science +17

Damage threshold for ion-beam induced graphitization of diamond

C. Uzan-Saguy, C. Cytermann, R. Brener et al. · Applied Physics Letters · 1995 · 305 citations

Natural Sciences, Materials Engineering, Materials Science +14

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Jiwang Yan, Masahiko Yoshino, T Kuriagawa et al. · Materials Science and Engineering A · 2001 · 162 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +16

Single-crystal diamond plate liftoff achieved by ion implantation and subsequent annealing

N.R. Parikh, John Hunn, E. McGucken et al. · Applied Physics Letters · 1992 · 154 citations

Natural Sciences, Materials Engineering, Materials Science +12