Ge diffusion and solid phase epitaxy growth to form Si1−xGex/Si and Ge on insulator structure

High-mobility Si and Ge structures

F. Schäffler · Semiconductor Science and Technology · 1997 · 765 citations

Engineering, Materials Science, Physics +17

High-quality Ge epilayers on Si with low threading-dislocation densities

Hsin-Chiao Luan, Desmond R. Lim, Kevin C. Lee et al. · Applied Physics Letters · 1999 · 677 citations

Engineering, Materials Engineering, Materials Science +16

Surfactant-controlled solid phase epitaxy of germanium on silicon

H. J. Osten, J. Klatt, G. Lippert et al. · Physical Review Letters · 1992 · 86 citations

Engineering, Materials Engineering, Materials Science +11

Germanium-on-insulator substrates by wafer bonding

Clarence J. Tracy, Peter Fejes, N. David Theodore et al. · Journal of Electronic Materials · 2004 · 71 citations

Engineering, Electrical Engineering, Materials Science +12

Thermal stability of undoped strained Si channel SiGe heterostructures

Hagen Klauk, Thomas N. Jackson, Shelby F. Nelson et al. · Applied Physics Letters · 1996 · 42 citations

Engineering, Electrical Engineering, Materials Science +17