Evolution of electrical parameters of dielectric-less ohmic RF-MEMS switches during continuous actuation stress

Abstract

The evolution of the main electrical parameters of dielectric-less ohmic RF-MEMS cantilever-based switches during continuous actuation stress was investigated in this work. Thanks to different designs, the main electrical parameters changes were attributed to a charging phenomena of the oxide over the substrate near the polysilicon actuator, leading to both narrowing and shifting of traditional hysteresis-like curves. Recovery procedures were also analyzed. Furthermore, the breakdown occurrence was also investigated, supported by both emission microscope and optical images.