Concepedia

Frequency dependence of the lifetime of a surface micromachined microengine driving a load

William M. Miller, K. Peterson, Michael T. Dugger, William P. Eaton, Lloyd W. Irwin, Donna Cowell Senft, Norman F. Smith, Paiboon Tangyunyong, S. L. Miller

Microelectronics Reliability · 1999 · 47 citations · 16 references

DOI

Concepts

References

16

Friction and wear of materials

Wear · 1965 · 3K citations

, , +10

Friction and Wear of Materials

E. Rabinowicz, R. I. Tanner · Journal of Applied Mechanics · 1966 · 1.5K citations · Full text

, , +10

Failure of Materials in Mechanical Design

Jack A. Collins, C. O. Smith · Journal of Mechanical Design · 1982 · 568 citations · Full text

, , +12

Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon

W. N. Sharpe, Bin Yuan, Ranji Vaidyanathan et al. · 1997 · 270 citations

, , +17

Surface micromachined microengine

Ernest J. Garcia, Jeffry J. Sniegowski · Sensors and Actuators A Physical · 1995 · 189 citations