Faceting and nanostructure effects in Si and SiGe epitaxy

Systematic Prediction of Kinetically Limited Crystal Growth Morphologies

Danxu Du, David J. Srolovitz, Michael E. Coltrin et al. · Physical Review Letters · 2005 · 121 citations

Natural Sciences, Materials Engineering, Materials Science +17

Facet investigation in selective epitaxial growth of Si and SiGe on (001) Si for optoelectronic devices

L. Vescan, K.N. Grimm, C. Dieker · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 64 citations

Engineering, Materials Engineering, Materials Science +16

Measuring the surface stress polar dependence

Nature Materials · 2005 · 49 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

Measuring the surface stress polar dependence

J.J. Métois, Andrés Saúl, Pierre Müller · LillOA (Université de Lille (University Of Lille)) · 2005 · 41 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +12

Facet Propagation in Si and SiGe Epitaxy or Etching

D. Dutartre, A. Talbot, N. Loubet · ECS Transactions · 2006 · 25 citations

Engineering, Materials Engineering, Materials Science +17