A study of two-step silicon anisotropic etching for a polygon-shaped microstructure using KOH solution

A gas chromatographic air analyzer fabricated on a silicon wafer

S.C. Terry, J.H. Jerman, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 1.4K citations

Natural Sciences, Chemical Engineering, Chemistry +17

Fabrication of novel three-dimensional microstructures by the anisotropic etching of

E. Bassous · IEEE Transactions on Electron Devices · 1978 · 311 citations

Engineering, Materials Engineering, Materials Science +15

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

Ink jet printing nozzle arrays etched in silicon

E. Bassous, H. Taub, L. Kuhn · Applied Physics Letters · 1977 · 149 citations

Engineering, Materials Engineering, Materials Science +10

A micro membrane pump with electrostatic actuation

Roland Zengerle, H. Sandmaier · 1992 · 144 citations

Engineering, Electrical Engineering, Mechanical Engineering +13