Fabrication of normally-closed bidirectional micropumps in silicon–polymer technology featuring photopatternable silicone valve lips

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Electrical Engineering, Engineering, Micromachines +9

Adhesive wafer bonding

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Engineering, Mechanical Engineering, Biomedical Engineering +16

Piezoelectric micropump with three valves working peristaltically

J.G. Smits · Sensors and Actuators A Physical · 1990 · 361 citations · Full text

Integrated Circuit Techniques, Engineering, Soft Robotics +13

A bidirectional silicon micropump

Roland Zengerle, Joachim Ulrich, Stefan Kluge et al. · Sensors and Actuators A Physical · 1995 · 313 citations

Engineering, Microfabrication, Bidirectional Silicon Micropump +3

A thermopneumatic micropump based on micro-engineering techniques

F.C.M. van de Pol, H.T.G. van Lintel, M. Elwenspoek et al. · Sensors and Actuators A Physical · 1990 · 279 citations · Full text

Engineering, Soft Robotics, Micromachines +8