Applied Surface Science · 2004 · 12 citations · 13 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials CharacterizationSemiconductor MaterialsSemiconductor Crystal GrowthSemiconductor Device MaterialsSilicon MaterialsSinteringPolycrystalline GrowthSilicon CarbideSilicon Carbide Crystal Growth
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Raman Investigation of SiC Polytypes
Satοru Nakashima, Hisatomo Harima · physica status solidi (a) · 1997 · 916 citations
Silicon carbide as a new MEMS technology
P.M. Sarro · Sensors and Actuators A Physical · 2000 · 416 citations