Concepedia

Characterization of Al2O3–HfO2–Al2O3 sandwiched MIM capacitor under DC and AC stresses

Ho‐Young Kwak, Hyuk-Min Kwon, Yi-Jung Jung, Sung-Kyu Kwon, Jae‐Hyung Jang, Woon-Il Choi, Man-Lyun Ha, Ju-Il Lee, Song-Jae Lee, Hi‐Deok Lee

Solid-State Electronics · 2012 · 27 citations · 8 references

DOI

Concepts

References

8

High-density MIM capacitors using Al<sub>2</sub>O<sub>3</sub> and AlTiO<sub>x</sub> dielectrics

S.B. Chen, Chyong‐Huey Lai, Albert Chin et al. · IEEE Electron Device Letters · 2002 · 168 citations

, , +12

A high-density MIM capacitor (13 fF/μm/sup 2/) using ALD HfO<sub>2</sub> dielectrics

Xiongfei Yu, Chunxiang Zhu, Hang Hu et al. · IEEE Electron Device Letters · 2003 · 144 citations

, , +15

A high performance MIM capacitor using HfO<sub>2</sub> dielectrics

Hang Hu, Chunxiang Zhu, Yongfeng Lu et al. · IEEE Electron Device Letters · 2002 · 131 citations

, , +17

Physical and electrical characterization of HfO2 metal–insulator–metal capacitors for Si analog circuit applications

Hang Hu, Chunxiang Zhu, Y. F. Lu et al. · Journal of Applied Physics · 2003 · 108 citations

, , +17

PVD HfO<sub>2</sub> for high-precision MIM capacitor applications

Sun Jung Kim, Byung Jin Cho, Ming Fu Li et al. · IEEE Electron Device Letters · 2003 · 58 citations

, , +13