Fabrication of 100 nm gate length MOSFET's using a novel carbon nanotube-based nano-lithography

Jaber Derakhshandeh, Yaser Abdi, S. Mohajerzadeh, H. Hosseinzadegan, Ebrahim Asl Soleimani, Henry H. Radamson

Materials Science and Engineering B · 2005 · 12 citations · 9 references

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