Publication | Closed Access
Effect of patterning on thermal agglomeration of ultrathin silicon-on-insulator layer
32
Citations
11
References
2002
Year
Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringMicrofabricationSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationThermal ConductionElectronic PackagingSilicon On InsulatorMicroelectronicsThermal AgglomerationThermal Conductivity
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