Solid-phase crystallization of amorphous SiGe films deposited by LPCVD on SiO2 and glass - Concepedia

Concepedia

Publication | Closed Access

Solid-phase crystallization of amorphous SiGe films deposited by LPCVD on SiO2 and glass

63

Citations

4

References

1999

Year

J. Olivares, Á. Rodríguez, J. Sangrador, T. Rodrı́guez, C. Ballesteros, A. Kling

Thin Solid Films

Materials ScienceSolid-phase CrystallizationAmorphous Sige FilmsEngineeringApplied PhysicsThin FilmsAmorphous SolidChemical Vapor DepositionThin Film Processing

References

	Year	Citations

Page 1