Solid-phase crystallization of amorphous SiGe films deposited by LPCVD on SiO2 and glass

Polycrystalline silicon thin films processed with silicon ion implantation and subsequent solid-phase crystallization: Theory, experiments, and thin-film transistor applications

Noriyoshi Yamauchi, R. Reif · Journal of Applied Physics · 1994 · 142 citations

Engineering, Materials Engineering, Materials Science +17

Solid phase crystallization of amorphous Si1−<i>x</i>Ge<i>x</i> films deposited on SiO2 by molecular beam epitaxy

Chang-Won Hwang, Myung‐Kwan Ryu, Ki‐Bum Kim et al. · Journal of Applied Physics · 1995 · 67 citations

Natural Sciences, Materials Engineering, Materials Science +17

Properties of crystallized Si1−xGex thin films deposited by sputtering

Emil V. Jelenković, Zhenhua Sun, Chee Leung Mak et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +17

Crystallization of amorphous hydrogenated Si1−xGex films

F. Edelman, R. Weil, P. Werner et al. · physica status solidi (a) · 1995 · 29 citations

Natural Sciences, Materials Science, Physics +17