Correlation of electrical and morphological properties of sputtered aluminum nitride films with deposition temperature

Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition

F. Engelmark, G. Fucntes, Ilia Katardjiev et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 92 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of substrate composition on the piezoelectric response of reactively sputtered AlN thin films

Judith A. Ruffner, Paul G. Clem, Brace Tuttle et al. · Thin Solid Films · 1999 · 83 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Low‐Temperature Deposition of Highly Textured Aluminum Nitride by Direct Current Magnetron Sputtering for Applications in Thin‐Film Resonators

R. Naik, R. Reif, J.J. Lutsky et al. · Journal of The Electrochemical Society · 1999 · 67 citations

Natural Sciences, Materials Engineering, Materials Science +17

Influence of crystal properties on the absorption IR spectra of polycrystalline AlN thin films

A. Sanz‐Hervás, E. Iborra, M. Clément et al. · Diamond and Related Materials · 2003 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +16

Structural, optical, and acoustic characterization of high-quality AlN thick films sputtered on Al2O3(0001) at low temperature for GHz-band electroacoustic devices applications

Cinzia Caliendo, P. Imperatori · Journal of Applied Physics · 2004 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +17