Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching

Abstract

Controlling the shape and gap width of silicon electrodes using local anodic oxidation and anisotropic TMAH wet etching, Rouhi, Jalal, Mahmud, Shahrom, Hutagalung, Sabar Derita, Naderi, Nima, Kakooei, Saeid, Abdullah, Mat Johar