Prediction of plasma etching using a randomized generalized regression neural network

A general regression neural network

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Computing, Computer Science, Machine Learning +15

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Syamala Srinivasan, Douglas C. Montgomery · Technometrics · 1992 · 2.6K citations

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Parallel & distributed processing

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Advantages of plasma etch modeling using neural networks over statistical techniques

C.D. Himmel, G.S. May · IEEE Transactions on Semiconductor Manufacturing · 1993 · 194 citations

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An optimal neural network plasma model: a case study

Byungwhan Kim, Sungjin Park · Chemometrics and Intelligent Laboratory Systems · 2001 · 75 citations

Natural Sciences, Mathematics, Optimization +12