Concepedia
Statistics
Publications
53
Citations
1.3K
H-Index
22
Active since
1994
Affiliations
Sejong University(Current)
Chonnam National University
Korea University
Hanseo University
Electronics and Telecommunications Research Institute
Byungwhan Kim is an author at Sejong University specializing in materials science, materials engineering, and plasma physics.
Publications per year
1994–2015
An optimal neural network process model for plasma etching
Byungwhan Kim, G.S. May · IEEE Transactions on Semiconductor Manufacturing · 1994 · 109 citations
Engineering, Computer Engineering, Electrical Engineering +17
An optimal neural network plasma model: a case study
Byungwhan Kim, Sungjin Park · Chemometrics and Intelligent Laboratory Systems · 2001 · 75 citations
Natural Sciences, Mathematics, Optimization +12
Prediction of plasma etching using a randomized generalized regression neural network
Byungwhan Kim, Duk Woo Lee, Kyung Young Park et al. · Vacuum · 2004 · 67 citations
Computing, Computer Science, Electrical Engineering +12
Modelling of plasma etching using a generalized regression neural network
Byungwhan Kim, Sungmo Kim, Kunho Kim · Vacuum · 2003 · 57 citations
Engineering, Computational Engineering, Machine Learning +11
Modeling SiC etching in C2F6/O2 inductively coupled plasma using neural networks
Byungwhan Kim, Sung-Min Kong, Byung-Taek Lee · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 39 citations
Engineering, Materials Engineering, Materials Science +9
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