Concepedia

Sungmo Kim

SK

Statistics

Publications

4

Citations

99

H-Index

4

Active since

2003

Affiliations

Sejong University(Current)

Sungmo Kim is an author at Sejong University specializing in engineering, microfabrication, and electrical engineering.

Top concepts

EngineeringDiagnosisMicrofabricationElectrical EngineeringHealthEducationRadiologyMeasurementData ScienceApplied Physics

Publications per year

2003–2005

4

Publications

4

Modelling of plasma etching using a generalized regression neural network

Byungwhan Kim, Sungmo Kim, Kunho Kim · Vacuum · 2003 · 57 citations

Electrical Engineering, Engineering, Microfabrication +2

Plasma diagnosis by recognizing in situ data using a modular backpropagation network

Byungwhan Kim, Sungmo Kim · Chemometrics and Intelligent Laboratory Systems · 2003 · 14 citations

Situ Data, Engineering, Machine Learning +12

Diagnosis of plasma processing equipment using neural network recognition of wavelet-filtered impedance matching

Byungwhan Kim, Sungmo Kim · Microelectronic Engineering · 2005 · 14 citations

Wavelet-filtered Impedance Matching, Condition Monitoring, Engineering +11

Proximity-controlled silicon carbide etching in inductively coupled plasma

Byungwhan Kim, Sungmo Kim, Soo-Chnag Ann et al. · Thin Solid Films · 2003 · 14 citations

Electrical Engineering, Engineering, Microfabrication +6

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