Concepedia

C.D. Himmel

CH

Statistics

Publications

5

Citations

299

H-Index

5

Active since

1993

Affiliations

Georgia Institute of Technology(Current)

C.D. Himmel is an author at Georgia Institute of Technology specializing in engineering, electrical engineering, and computer engineering.

Top concepts

EngineeringElectrical EngineeringComputer EngineeringProcess ControlMachine LearningMicroelectronicsSystems EngineeringIndustrial EngineeringModeling And SimulationSimulation

Publications per year

1993–2005

5

Publications

5

Advantages of plasma etch modeling using neural networks over statistical techniques

C.D. Himmel, G.S. May · IEEE Transactions on Semiconductor Manufacturing · 1993 · 193 citations

Statistical Techniques, Electrical Engineering, Polysilicon Films +12

Time series modeling of reactive ion etching using neural networks

M.D. Baker, C.D. Himmel, G.S. May · IEEE Transactions on Semiconductor Manufacturing · 1995 · 49 citations

Engineering, Machine Learning, Neural Networks (Machine Learning) +17

In-situ prediction of reactive ion etch endpoint using neural networks

M.D. Baker, C.D. Himmel, G.S. May · IEEE Transactions on Components Packaging and Manufacturing Technology Part A · 1995 · 23 citations

Electrical Engineering, Engineering, Industrial Engineering +10

A comparison of statistically-based and neural network models of plasma etch behavior

C.D. Himmel, B. Kim, G.S. May · 2003 · 21 citations

Materials Science, Chemical Engineering, Electrical Engineering +13

Real-time predictive control of semiconductor manufacturing processes using neural networks

C.D. Himmel, Tae Seon Kim, A.F. Krauss et al. · 2005 · 13 citations

Engineering, Industrial Engineering, Intelligent Control +14

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