XPS, UV–vis spectroscopy and AFM studies on removal mechanisms of Si-face SiC wafer chemical mechanical polishing (CMP)

Yan Zhou, Guoshun Pan, Xiao‐Lei Shi, Li Xu, Chunli Zou, Hua Gong, Guihai Luo

Applied Surface Science · 2014 · 135 citations · 33 references

Concepts

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