Materials Science and Engineering B · 1999 · 16 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsElectronic MaterialsSemiconductor MaterialsEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor PhysicsSilicon MaterialsWide Band Gap SemiconductorsAtomic Layer EpitaxyEpitaxial Film GrowthEpitaxial Growth KineticsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Crystal GrowthSublimation
7