Thin Solid Films · 2005 · 15 citations · 11 references
EngineeringMaterials EngineeringMaterials ScienceOptical MaterialsOptoelectronicsSemiconductor MaterialsChemical Vapor DepositionLight-emitting DiodesLuminescent MaterialsOptical Properties Of SemiconductorsSemiconductor Device MaterialsSilicon MaterialsLuminescence LifetimeSiliconSilicon DioxideSilicon Optical PropertiesVapor Phase Etching
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Porous silicon formation by stain etching
É. Vázsonyi, E. Szilágyi, P. Petrík et al. · Thin Solid Films · 2001 · 97 citations