Concepedia

Vapor Phase Etching

Vapor Phase Etching is a dry etching process in semiconductor manufacturing that uses gaseous chemicals to selectively remove material from a substrate surface through chemical reactions in the vapor phase.

98

Publications

3.9K

Citations

363

Authors

107

Institutions

Publications per year

2017–2026

11

Variants

Vpe

Parents

Publications

98

Characterization of threading dislocations in GaN epitaxial layers

T. Hino, Shigetaka Tomiya, T. Miyajima et al. · Applied Physics Letters · 2000 · 400 citations

, , +17

Reduction of Etch Pit Density in Organometallic Vapor Phase Epitaxy-Grown GaN on Sapphire by Insertion of a Low-Temperature-Deposited Buffer Layer between High-Temperature-Grown GaN

Motoaki Iwaya, Tetsuya Takeuchi, Shigeo Yamaguchi et al. · Japanese Journal of Applied Physics · 1998 · 192 citations

, , +13

Bioceramics for implant coatings

Allison A. Campbell · Materials Today · 2003 · 141 citations · Full text

, , +17

Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared

Jordi Soler Penadés, Carlos Alonso‐Ramos, Ali Z. Khokhar et al. · Optics Letters · 2014 · 127 citations

, , +17

Dislocation generation of GaAs on Si in the cooling stage

Masami Tachikawa, Hidefumi Mori · Applied Physics Letters · 1990 · 122 citations

, , +17

1–5 of 98

Authors

363

  1. MS
    M. Saadoun

    Research and Technology Center of Energy, Tunisia

    3 publications · 120 citations

    3

    h-index

  2. BB
    B. Bessaı̈s

    Research and Technology Center of Energy, Tunisia

    3 publications · 120 citations

    3

    h-index

  3. SK
    S. K. Ghandhi

    Rensselaer Polytechnic Institute, United States

    3 publications · 69 citations

    3

    h-index

  4. HC
    Harish C. Barshilia

    National Aerospace Laboratories, India

    2 publications · 45 citations

    2

    h-index

  5. RB
    R. Bhat

    Core Competence, United States

    2 publications · 49 citations

    2

    h-index

1–5 of 363

Institutions

107

  1. AT&T (United States)

    Bedminster, United States

    4 h-index

    21 publications

    479 citations

  2. Research and Technology Center of Energy

    Hammam-Lif, Tunisia

    3 h-index

    12 publications

    164 citations

  3. Texas Instruments (United States)

    Dallas, United States

    3 h-index

    7 publications

    170 citations

  4. Rensselaer Polytechnic Institute

    Troy, United States

    2 h-index

    5 publications

    124 citations

  5. Corning (United States)

    Corning, United States

    2 h-index

    4 publications

    81 citations

  6. The University of Tokyo

    Tokyo, Japan

    2 h-index

    10 publications

    315 citations

  7. Electronics and Telecommunications Research Institute

    Daejeon, South Korea

    2 h-index

    7 publications

    626 citations

  8. Pennsylvania State University

    State College, United States

    2 h-index

    7 publications

    399 citations

1–8 of 107

Venues

  1. Journal of The Electrochemical Society

    JES · 21 publications · 612 citations

    15

    h-index

  2. Journal of Crystal Growth

    11 publications · 180 citations

    10

    h-index

  3. Journal of Applied Physics

    5 publications · 187 citations

    5

    h-index

  4. Journal of Microelectromechanical Systems

    5 publications · 226 citations

    5

    h-index

  5. Thin Solid Films

    4 publications · 146 citations

    4

    h-index

1–5