Materials Science and Engineering B · 1998 · 12 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ScienceThin FilmsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsSinteringThin-film DepositionThin-film MaterialsSputter DepositionSputteringSputtering TechniquesThin Oxide FilmsThin Oxide Layers
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