Concepedia

Publication | Closed Access

Influence of manufacturing process of indium tin oxide sputtering targets on sputtering behavior

DOI

90

Citations

7

References

1992

Year

B.L. Gehman, S. K. M. Jönsson, Tobias Rudolph, Michael Scherer, M Weigert, Ronny Werner
Thin Solid Films

References

YearCitations

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