Concepedia

S. Ishibashi

SI

4

Publications

472

Citations

4

H-Index

1990

Active since

Affiliations

Ulvac (Japan)(Current)

S. Ishibashi is an author at Ulvac (Japan) specializing in materials science, surface science, and applied physics.

Top concepts

Publications per year

1990–2007

4

Publications

4

Low resistivity indium–tin oxide transparent conductive films. II. Effect of sputtering voltage on electrical property of films

S. Ishibashi, Yoshiyuki Higuchi, Yukihide Ota et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 275 citations

, , +20

Low resistivity indium–tin oxide transparent conductive films. I. Effect of introducing H2O gas or H2 gas during direct current magnetron sputtering

S. Ishibashi, Yoshiyuki Higuchi, Yukihide Ota et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 166 citations

, , +20

Process development of 6-in EUV mask with TaBN absorber

Tsutomu Shoki, Morio Hosoya, Takeru Kinoshita et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 17 citations

, , +17

Role of substrate bias on the magnetic properties and microstructure of CoCrPt:SiO2 perpendicular recording media

S. N. Piramanayagam, C. S. Mah, C. Y. Ong et al. · Journal of Applied Physics · 2007 · 14 citations

, , +20

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