Sensors and Actuators A Physical · 1994 · 96 citations · 12 references
EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsSemiconductor MaterialsSensorsHigh-temperature MaterialsSemiconductor Device MaterialsTemperature SensorsThermal SensorsWide Band Gap SemiconductorsWide-bandgap Semiconductor DevicesHigh-temperature ElectronicsSilicon CarbideSilicon Carbide (Sic) Materials
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