Concepedia

Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics

J. Gautier, Franck Delmotte, F. Bridou, M. F. Ravet, Françoise Varnière, Marc Roulliay, I. Vickridge

Applied Physics A · 2007 · 22 citations · 12 references

DOI

Concepts

References

12

IMD—Software for modeling the optical properties of multilayer films

David L. Windt · Computers in Physics · 1998 · 926 citations · Full text

, , +17

Optimizing High Harmonic Generation in Absorbing Gases: Model and Experiment

E. Constant, D. Garzella, P. Breger et al. · Physical Review Letters · 1999 · 624 citations

, , +15

Non-destructive X-ray study of the interphases in Mo/Si and Mo/B4C/Si/B4C multilayers

H. Maury, Philippe Jonnard, Jean André et al. · Thin Solid Films · 2006 · 43 citations

, , +10

Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium

Yu. A. Uspenskiǐ, John F. Seely, N. L. Popov et al. · Journal of the Optical Society of America A · 2004 · 43 citations

, , +17

Automatic characterization of layers stacks from reflectivity measurements. Application to the study of the validity conditions of grazing X-rays reflectometry

F. Bridou, B. Pardo · Journal of optics · 1990 · 42 citations · Full text

, , +13