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High Voltage (>2.5kV) 4H-SiC Schottky Rectifiers Processed on Hot-Wall CVD and High-Temperature CVD Layers
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1998
Year
Electrical EngineeringEngineeringHigh Voltage EngineeringPower DeviceHigh-temperature Cvd LayersApplied PhysicsPower Semiconductor DeviceHigh VoltageHot-wall CvdPower ElectronicsMicroelectronicsCarbide
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