Concepedia

Publication | Open Access

Fabrication, modeling and integration of a silicon technology force sensor in a piezoelectric micro-manipulator

DOIFull Paper Access

35

Citations

13

References

2006

Year

Ricardo Pérez, Nicolas Chaillet, K. Domański, P. Janus, P. Grabiec
Sensors and Actuators A Physical

References

YearCitations

Page 1