Concepedia

Enhancing the thermal stability of low dielectric constant hydrogen silsesquioxane by ion implantation

Tien‐Chun Chang, Mei-Fen Chou, Y.J Mei, J. S. Tsang, Fu‐Ming Pan, Wen-Fa Wu, M. S. Tsai, Chun–Yen Chang, Fu-Yung Shih, H.D Huangc

Thin Solid Films · 1998 · 11 citations · 2 references

DOI

Concepts

References

2

Methods And Needs For Low K Material Research

C. H. Ting, Thomas E. Seidel · MRS Proceedings · 1995 · 78 citations

, , +6

Low Dielectric Constant Materials for IC Intermetal Dielectric Applications: A Status Report on the Leading Candidates

Neil H. Hendricks · MRS Proceedings · 1996 · 39 citations

, , +17