Concepedia

M. S. Tsai

MS

Statistics

Publications

8

Citations

277

H-Index

8

Active since

1997

Affiliations

National Institutes of Applied Research(Current)

National Yang Ming Chiao Tung University

National Tsing Hua University

M. S. Tsai is an author at National Institutes of Applied Research specializing in engineering, materials science, and chemical engineering.

Top concepts

Publications per year

1997–2003

8

Publications

8

Effects of kinematic variables on nonuniformity in chemical mechanical planarization

H. Hocheng, Han-Hao Tsai, M. S. Tsai · International Journal of Machine Tools and Manufacture · 2000 · 89 citations

, , +10

Effects of corrosion environments on the surface finishing of copper chemical mechanical polishing

M.T Wang, M. S. Tsai, C Liu et al. · Thin Solid Films · 1997 · 56 citations

, , +9

Nitric acid-based slurry with citric acid as an inhibitor for copper chemical mechanical polishing

Tien Hu, Shao-Yu Chiu, B. T. Dai et al. · Materials Chemistry and Physics · 1999 · 42 citations

, , +8

Characterization of titanium nitride etch rate and selectivity to silicon dioxide in a Cl2 helicon-wave plasma

Hsien-Ming Chiu, Tsang‐Lang Lin, Yuan Hu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 23 citations

, , +14

Chemical-mechanical polishing of low-dielectric-constant spin-on-glasses: film chemistries, slurry formulation and polish selectivity

Yu‐Young Wang, C Liu, Shuwen Chang et al. · Thin Solid Films · 1997 · 22 citations

, , +11

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