Concepedia

Han-Hao Tsai

HT

Statistics

Publications

4

Citations

243

H-Index

4

Active since

2000

Affiliations

Industrial Technology Research Institute(Current)

National Tsing Hua University

Han-Hao Tsai is an author at Industrial Technology Research Institute specializing in engineering, material processing, and materials engineering.

Top concepts

EngineeringSurface ScienceMaterial ScienceMaterial ProcessingMaterials EngineeringMechanical EngineeringCorrosionMechanicsPlasticityApplied Physics

Publications per year

2000–2006

4

Publications

4

Effects of kinematic variables on nonuniformity in chemical mechanical planarization

H. Hocheng, Han-Hao Tsai, M. S. Tsai · International Journal of Machine Tools and Manufacture · 2000 · 89 citations

Engineering, Mechanics, Mechanical Engineering +10

An oxidation enhanced mechanical polishing technique for CVD diamond films

C.Y. Cheng, Han-Hao Tsai, Chien‐Hung Wu et al. · Diamond and Related Materials · 2005 · 54 citations

Materials Science, Materials Engineering, Diamond-like Carbon +7

Evaluation research of polishing methods for large area diamond films produced by chemical vapor deposition

Han-Hao Tsai, Chia‐Jen Ting, C. P. Chou · Diamond and Related Materials · 2006 · 51 citations

Materials Science, Materials Engineering, Diamond-like Carbon +10

Modeling and Experimental Analysis of the Material Removal Rate in the Chemical Mechanical Planarization of Dielectric Films and Bare Silicon Wafers

H. Hocheng, Han-Hao Tsai, Yi-Sheng Su · Journal of The Electrochemical Society · 2001 · 49 citations

Engineering, Mechanical Engineering, Dielectrics Cmp +18

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