Evaluation research of polishing methods for large area diamond films produced by chemical vapor deposition

The Synthesis of Diamond at Low Pressure

B.V. Derjaguin, D. B. Fedoseev · Scientific American · 1975 · 125 citations

Natural Sciences, Materials Engineering, Materials Science +7

Thermochemical polishing of CVD diamond films

A.M. Zaitsev, G.C. Kosaca, B. Richarz et al. · Diamond and Related Materials · 1998 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +8

Smoothing of chemically vapour deposited diamond films by ion beam irradiation

Atsushi Hirata, Hitoshi TOKURA, Masanori Yoshikawa · Thin Solid Films · 1992 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +9

Sequential multiple-laser-assisted polishing of free-standing CVD diamond substrates

Arzu Ozkan, Ajay P. Malshe, William D. Brown · Diamond and Related Materials · 1997 · 58 citations

Engineering, Materials Engineering, Materials Science +14

An oxidation enhanced mechanical polishing technique for CVD diamond films

C.Y. Cheng, Han-Hao Tsai, Chien‐Hung Wu et al. · Diamond and Related Materials · 2005 · 57 citations

Natural Sciences, Materials Engineering, Materials Science +10