Sequential multiple-laser-assisted polishing of free-standing CVD diamond substrates

Excimer-laser etching of diamond and hard carbon films by direct writing and optical projection

M. Rothschild, C. Arnone, D. J. Ehrlich · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 129 citations

Natural Sciences, Materials Engineering, Materials Science +15

Reactive ion etching of diamond

Gurtej Sandhu, Whei-Lee Chu · Applied Physics Letters · 1989 · 108 citations

Natural Sciences, Materials Engineering, Materials Science +16

Etching of diamond with argon and oxygen ion beams

Timothy J. Whetten, Angela A. Armstead, Thomas A. Grzybowski et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 83 citations

Natural Sciences, Materials Science, Physics +12

Smoothing of chemically vapour deposited diamond films by ion beam irradiation

Atsushi Hirata, Hitoshi TOKURA, Masanori Yoshikawa · Thin Solid Films · 1992 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +9

Modelling of self-limiting laser ablation of rough surfaces: application to the polishing of diamond films

V. N. Tokarev, J.I.B. Wilson, M.G. Jubber et al. · Diamond and Related Materials · 1995 · 61 citations

Engineering, Materials Engineering, Materials Science +16