Diamond and Related Materials · 2005 · 57 citations · 3 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ProcessingSurface EngineeringSurface ScienceChemical Vapor DepositionPhysical Vapor DepositionSurface ModificationThin Film OxidationMechanical PolishingPolishingPolishing Processes
3
Thermochemical polishing of CVD diamond films
A.M. Zaitsev, G.C. Kosaca, B. Richarz et al. · Diamond and Related Materials · 1998 · 93 citations
Natural Sciences, Materials Engineering, Materials Science +8